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ISSN 2664-2441 (Online)
ISSN 2073-9583 (Print)

Phase composition, structure and level of mechanical stresses in nanoscale films of Co - Sb

Metalozn. obrobka met., 2016, Tom 77, No 1, cc.39-43
doi.org

Iu. N. Makogon, Doctor of Technical Science, Professor
S. I. Sidorenko, Corresponding Member of the NAS of Ukraine, Professor
R. А. Shkarban

National Technical University of Ukraine “Kyiv Polytechnic Institute”, Kyiv

UDC 539.216.2:661.685
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Summary

The regularities of formation of phase composition and structure and the level of stress in nanoscale films CoSbx(30 nm) (1,8 < x < 4,2) (65 - 81 at. % Sb), grown by molecular beam deposition on the substrate SiO2(100 nm) / Si(001) at a temperature of 200 °С and annealed under vacuum in the range (200 - 700) °С are determined. It was found that the pattern of formation of phase composition in the Co - Sb films after deposition is defined by the sequence that is similar to the diagram of phase equilibrium for a massive state of Co - Sb system. It is shown that at annealing the films at temperatures above 300 °С the excess antimony sublimation and antimony of a crystalline phase CoSb3 occurs, which leads to increased mechanical stress of ~ 5 times and is accompanied by a decrease in the size of the coherent-scattering region phase CoSb3, occurrence of cracks and subsequent degradation of the film material.

References

  1. Ioffe A.F. Energeticheskiye osnovy termoelektricheskikh batarey iz poluprovodnikov, Leningrad: AN SSSR, 1950, 169 p. [in Russian].
  2. Yepremyan A.O., Arutyunyan V.M., Vaganyan A.I., Osnovnyye problemy energetiki i alternativnoy energetiki, 2005, No 12, pp. 7 – 10 [in Russian].
  3. Freyik D.M., Halushchak M.O., Krynytsʹkyy O.S., Fizyka i khimiya tverdoho tila, 2013, Vol. 14, No 2, pp. 302 – 303 [in Ukrainian].
  4. Xiao Jing Zheng, Linli Zhu, You-He Zhou, Applied Physics Letters, 2005, Vol. 87, No 242, pp. 101 [in English].
  5. Gruber W., Chakravarty S., Baehtz C., Physical Review Letters, 2011, No 107, pp. 163 [in English].
  6. Makogon Yu.N., Sidorenko S.I., Beke D., Metallofizika i noveyshiye tekhnologii, 2014, Vol. 36, No 12, pp. 1621 – 1634 [in Russian].
  7. Makohon Yu.M., Pavlova O.P., Sydorenko S.I., Metallofyzyka y noveyshye tekhnolohy, 2011, Vol. 35, No 2, pp. 195 – 202 [in Russian].
  8. Degang Zhaoa, Changwen Tiana,Yunteng Liua, Journal of Alloys and Compounds, 2011, No 509, pp. 3166 – 3171[in English].
  9. Daniel M., Brombacher C., Beddies G., Journal of Alloys and Compounds, 2015, No 624, pp. 216 – 225 [in English].